• systems
  • OCTOPLUS⁺ 400
  • OCTOPLUS⁺ 500
  • OCTOPLUS⁺ Individual
  • Omicron MULTIPROBE MBE systems
  • compact rapid thermal annealing system AO 500
  • in-situ etching system ISES
  
  
  

• substrate manipulation
  • substrate manipulator SH
  • oxygen resistant substrate manipulator SH-O
  • wafer heater WH
  
  
• effusion cells/other sources
  • standard effusion cell WEZ
  • production effusion cell PEZ
  • low temperature effusion cell NTEZ
  • organic material effusion cell OME
  • high temperature effusion cell HTEZ
  • high temperature source HTS
  • oxygen resistant effusion cell OREZ
  • GaP compound source DECO
  • silicon sublimation source SUSI
  • carbon sublimation source SUKO
  
  
• valved sources
  • valved GaP compound source VGCS
  • valved arsenic cracker source VACS
  • valved mercury evaporation source HGS
  
  
• e-beam evaporators
  • electron beam evaporator EBV
  • multi-pocket evaporator EBVM
  • vertical electron beam evaporator EBVV
  • power supplies for EBV-series HV
  
  
• dopant sources
  • doping effusion cells EZ
  • dual dopant sources DCS
  • phosphorus doping source DECO-D
  • silicon doping source SUSI
  • carbon doping source SUKO-D
  • boron doping source EBVV-B
  
  
• gas sources
  • hydrogen atom beam source HABS
  • oxygen atom beam source OBS
  • thermal gas injector TGI
  
  
• equipment
  • power supply and temperature control PS
  • cables and connectors CA
  • manipulator control unit MCU
  • cryopump valve control unit CVCU
  • beam flux monitor BFM
  • cooling shroud CS
  • shutter S
  • shutter control unit SCU
  • soft-acting rotary shutter module RSM
  • soft-acting linear shutter module LSM
  • magnetic rotary feedthrough MRD
  • viewport shutter FSH
  • refractory metal parts RMP
  • crucibles CRU
  
  

• selection by element
• selection by vapor pressure
• select by doping application
• selection by system

additional product informations

• flange and tube dimensions
• how to order
• references

news

• company news
• conferences

about us

• Dr. Karl Eberl - list of publications
• company profile
• terms & conditions
• allgemeine lieferbedingungen
• imprint / impressum

contact

• contact our headquarters
• contact our representatives

catalog PDF download

site map

 LAST UPDATE: APRIL, 2008

© 2003 Dr. Eberl MBE-Komponenten GmbH