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| VALVED SOURCES |
| VGCS I VACS I AKS I HGS |
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HGS 63-250 valved mercury evaporation source on DN63 CF |
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The Valved Mercury (Hg) Evaporation Source HGS is designed for evaporation of elemental mercury in standard UHV or MBE systems. The source consists of the 250 cm3 evaporator, heated by a thermostat, the heated valve and the heated injector unit which acts as the interface to the UHV system. Both components valve and injector are heated independently to avoid material condensation. |
HGS 63-250 source mounted to UHV chamber |
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Easy and safe refilling is provided by an additional container which is mounted to the equalizing tank and which can be filled from air side. |
Equalizing tank with level control viewport |
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Application
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Principle sketch of the HGS |
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References
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Technical Data
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Specific Data For general information on CF mounting flanges see "Flange and Gasket Dimensions".
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LAST UPDATE: APRIL, 2007 |
© 2003 Dr. Eberl MBE-Komponenten GmbH |
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