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MRD 16, magnetic rotary feedthrough on DN16 (O.D.1.33") CF-flange

• Fully UHV compatible, leakproof
• DN16 CF mounting flange
• Magnetically coupled feedthrough
• > 0.4 Nm maximum torque
• Precision ball bearing construction
• Continuous rotation, long lifetime
• Position lock
• Bakeable up to 300°C

The Magnetic Rotary Feedthrough - MRD - is a high precision magnetically coupled feedthrough for continuous rotation in UHV. It is especially designed for long-time operation in UHV conditions and provides high reliability.

Due to the well designed ball bearing construction a very small absolute shaft wobble is achieved. Besides the precise rotation also an increase of the MRD lifetime is obtained. Further the design without welding seam makes the MRD leakproof and thus excellent for UHV application. Another functional part of the MRD is the lock screw.



Application

The high precision feedthrough MRD 16 is recommended for use with substrate manipulators for continuous substrate rotation. The motorized feedthrough and the substrate rotation control are described in the chapter MCU. Do also use our MRD 16 for other UHV positioning applications requiring precise rotary motion.



Dimensions

Schematic drawing of the Magnetic Rotary Feedthrough MRD 16

 LAST UPDATE: NOVEMBER, 2004

© 2003 Dr. Eberl MBE-Komponenten GmbH