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CS 100-63, water cooling shroud on a DN100 CF (O.D. 6") flange, fitting to a DN63 CF (O.D. 4.5") source flange

  
  • Compatible with most MBE systems
  • Highest welding and steel quality
  • Different kinds of cooling shrouds
  • Water or liquid nitrogen cooling
  • Optional: integrated shutter
 
 

CSS 63-40-S, water cooling shroud on a DN63 CF (O.D. 4.5") flange, with additional source flange DN40 CF (O.D. 2.75") and integrated shutter

  

The separate cooling shrouds can be used in combination with evaporation sources that have no integrated water cooling on their mounting flange. Due to their all stainless steel construction they are bakeable up to 400°C without water flow.

Water cooling shrouds fit most port flanges DN63 CF or larger. They are equipped with a mounting flange to the port and a source flange which corresponds with the mounting flange of the evaporation source. Instead of an additional flange (designs CSS/CSR) a zero-length adapter flange can be used as mounting as well as source flange (design CS).

  
 

CSS 63-40, water cooling shroud on a DN63 CF (O.D. 4.5") flange, with additional flange - DN40 CF (O.D. 2.75"); airside view


  

Our cooling shrouds are compatible with most MBE systems as for example Riber, VG Semicon, Varian, Eiko, DCA, Veeco Applied Epi and Omicron. For other systems please specify mounting flange, in-vacuum length, in-vacuum diameter, substrate size and the distance from cell orifice to the substrate.

 
 

Cooling and Shutter Options

We offer water cooling shrouds (liquid nitrogen cooling, LN, is possible with some shrouds on request). Optionally we offer shrouds with the cooling tube welded directly on the flange ("closed cooling", option C).
CS and CSS cooling shrouds are available with additional shutter (option S). The shutter rod is guided in a tube inside the cooling shroud and a DN16 CF flange is added to the mounting flange to carry the rotary shutter feedthrough. For automated processes we offer electrically driven soft-acting rotary shutter modules RSM in combination with shutter control units.

 
 
 

Dimensions

CS

Schematic drawing of the Cooling Shroud CS, with zero-length adapter flange (drawing shows CS 100-63)



CSS

Schematic drawing of the Cooling Shroud CSS, with additional source flange (drawing shows CSS 63-40-S)



CSR

Schematic drawing of the Cooling Shroud CSR, with additional source flange (drawing shows CSR 100-63)

  
 
 

Specific Data

For general information on CF mounting flanges see "Flange and Gasket Dimensions".

System manufacturer:    MBE-Komponenten, Omicron and other manufactures not separately listed
 
            [mm] / [mm] [mm]   [mm] [mm]
CS 63 - 40 - C-, S*-   LxxxD58 - SLxxx**   39 17.4
CS 100 - 40 - S*- LN - LxxxD95 - SLxxx**   39 19.9
CS 100 - 63 - C-, S*-   LxxxD95 - SLxxx**   72 19.9
CS 150 - 100 - C-, S*-   LxxxD145 - SLxxx**   100 22.3
CS 200 - 150 - C-, S*-   LxxxD190 - SLxxx**   160 24.6
CSS 63 - 40 - S*-   LxxxD58 - SLxxx**   39 90.0
CSS 100 - 63 - S*- LN - LxxxD95 - SLxxx**   65 100.0
CSR 63 - 40 -     LxxxD57 - ALxxx   39 = AL
CSR 100 - 63 -     LxxxD95 - ALxxx   65 = AL
*    rotary shutter possible on same flange             
**  omitted when not specified      
*** specify UHV length L with order      


Example for Product Identfication Code:

CSS 100-63-S-L290D95 is a water cooling shroud with DN100 CF mounting flange and additional DN63 CF source flange, integrated shutter; in-vacuum length 290mm and diameter 95mm.
 
 
 

 LAST UPDATE: SEPTEMBER, 2008

© 2003 Dr. Eberl MBE-Komponenten GmbH