Select product by:  ELEMENT  I   VAPOR PRESSURE  

CS 100-63, water cooling shroud on a DN100 CF (O.D. 6") flange, fitting to a DN63 CF (O.D. 4.5") source flange

• Compatible with most MBE systems
• Highest welding and steel quality
• Different kinds of cooling shrouds
• Water or liquid nitrogen cooling
• Optional: integrated shutter

CSS 63-40-S, water cooling shroud on a DN63 CF (O.D. 4.5") flange, with additional flange - DN40 CF (O.D. 2.75") - and integrated shutter

The separate cooling shrouds can be used together with most evaporation sources.

CSS 63-40, water cooling shroud on a DN63 CF (O.D. 4.5") flange, with additional flange - DN40 CF (O.D. 2.75"); airside view

Our cooling shrouds are compatible with most MBE systems as for example Riber, Thermo VG Semicon, Varian, Eiko, DCA, Veeco Applied Epi, Omicron. For other systems please specify mounting flange, in?vacuum length, in-vacuum diameter, substrate size and the distance from cell orifice to the substrate.

Cooling and Shutter Options

We offer water cooling shrouds, but liquid nitrogen cooling is possible with some shrouds, on request. Optionally we offer shrouds with the cooling tube welded directly on the flange and we call this "closed cooling". Most cooling shrouds are available with an additional shutter option. The shutter rod is guided in a tube inside the cooling shroud and a DN16 CF flange is added to the mounting flange to carry the rotary shutter feedthrough. For automated processes we offer electrically driven soft-acting rotary shutter modules (RSM, see page 134) in combination with shutter control units

Dimensions

Schematic drawing of the Cooling Shroud CS, with zero-length adapter flange( Drawing shows CS 100-63 )

Schematic drawing of the Cooling Shroud CSS,with additional source flange( Drawing shows CSS 63-40-S )

 LAST UPDATE: NOVEMBER, 2004

© 2003 Dr. Eberl MBE-Komponenten GmbH