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CS 100-63, water cooling shroud on a DN100 CF (O.D. 6") flange, fitting to a DN63 CF (O.D. 4.5") source flange |
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CSS 63-40-S, water cooling shroud on a DN63 CF (O.D. 4.5") flange, with additional source flange DN40 CF (O.D. 2.75") and integrated shutter |
The separate cooling shrouds can be used in combination with
evaporation sources that have no integrated water cooling on their mounting flange. Due to their all stainless steel construction they are bakeable up to 400°C without water flow. |
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CSS 63-40, water cooling shroud on a DN63 CF (O.D. 4.5") flange, with additional flange - DN40 CF (O.D. 2.75"); airside view |
Our cooling shrouds are compatible with most MBE systems as for example Riber, VG Semicon, Varian, Eiko, DCA, Veeco Applied Epi and Omicron. For other systems please specify mounting flange, in-vacuum length, in-vacuum diameter, substrate size and the distance from cell orifice to the substrate. |
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Cooling and Shutter Options | ||
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Dimensions
Schematic drawing of the Cooling Shroud CS, with zero-length adapter flange (drawing shows CS 100-63)
Schematic drawing of the Cooling Shroud CSS, with additional source flange (drawing shows CSS 63-40-S)
Schematic drawing of the Cooling Shroud CSR, with additional source flange (drawing shows CSR 100-63) |
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Specific Data For general information on CF mounting flanges see "Flange and Gasket Dimensions".
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LAST UPDATE: SEPTEMBER, 2008 |
© 2003 Dr. Eberl MBE-Komponenten GmbH |
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