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CBI, cross beam ioniser mounted onto CS 100-63 cooling shroud |
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The Cross Beam Ioniser - CBI - is an extension of standard effusion cells which provides the partial ionisation of the vapour beam needed for ion-assisted MBE growth.
The CBI is based on the principle of cross beam ionisation.
The e-beam source is mounted on top of a cell cooling shroud and outside the molecular beam of the effusion cell, in order to minimize material deposition onto the filament, the electrical connectors and the e-beam source housing.
The design of the e-beam source ensures that the high electrical fields used for electron acceleration are located within the e-beam source housing only. The outside area is carefully shielded. This minimizes the electrical fields outside the e-beam source and enables the production of low energy ions.
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