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WEZ 40-10-22-KS, effusion cell with integrated cooling shroud and
shutter on DN40 (O.D.2.75") CF-flange, with 10 cm³ PBN crucible

• Compatible with all MBE systems
• All standard crucibles available,
  crucible capacities 2-200 cm³
• Most effective heating system
• High reliability and long lifetime
• Hot lip, cold lip and dual filaments
• Optional: on cell flange integrated
  cooling shroud and shutter

The Standard Effusion Cell WEZ is designed for elemental and compound evaporation or sublimation in the temperature range from 200°C to 1400°C.

The WEZ can be used to evaporate standard III-V MBE materials (Al, Ga, In), but may also be used as a doping source (e.g. Si or Be). Standard, hot lip, cold lip and dual filament types are available, covering different evaporation material requirements.

Beside the standard crucible material PBN (pyrolytic boron nitride), other crucible materials such as Al₂O₃, PG (pyrolytic graphite) or quartz are also available.
The crucible is heated by a tantalum wire filament supported by PBN rings (see figure). This wire heater concept provides excellent temperature uniformity within the crucible and effective heating even at the crucible lip, and allows the use of different shaped crucibles. Due to the reduced touch between the filament wires and the PBN supporting rings minimum decomposition of PBN at operation temperature is achieved. Other advantages are excellent reliability, long-term stability and an extended lifetime, compared with Ta-foil heaters.

Schematic of the wire heating assembly

Application

The standard effusion cell WEZ is recommended for elements and compounds evaporated or sublimated at temperatures in the range 200-1400°C, e.g. Ga, In, Al, Si, Be, Cu, Ag, BaF₂, CaF₂, etc.

The WEZ is used for sample preparation, thin film growth and MBE applications. For instance, the WEZ 40-10-22-KS with its compact design is particularly suited to material deposition on small samples in surface analysis systems. With the WEZ 16-5-16 (see figure on the right) even DN16 (O.D. 1.33") CF ports, previously used as view ports etc., can be re-used as additional source ports.

For MBE applications we have sources tailored to the different evaporation material requirements, e.g. hot lip or dual filament sources for Ga and In, or cold lip sources for Al. WEZ cells can be used both for growth and doping applications.
Effusion cells with conical shaped crucibles are specially optimized for doping applications, please see EZ Doping Effusion Cells

WEZ 16-5-16 Mini Effusion Cell on DN16 CF (O.D. 1.33") flange, with 5 cm³ PBN crucible

Technical Data

Crucibles

We provide all standard crucible shapes and sizes to ensure compatibility to all MBE systems.
The standard size ranges from 2 to 200 cm³. Beside the standard cylindrical crucible shape we also supply conical crucibles (e.g. taper angle 7°). Other dimensions and shapes are possible on request.
Standard crucible material is PBN, but other crucible materials are also available. Please inquire if you are not sure which material is best for your evaporant. For detailed information see equipment page "Crucibles".

The second number in our Product-code is the crucible capacity [in cm³], the third number indicates the lip diameter of the crucible. Please specify crucible material if not PBN.

Dimensions

Specific Data

For general information on CF mounting flanges see "Flange and Gasket Dimensions".

System manufacturer:    MBE-Komponenten, Omicron and other manufactures not separately listed
				[cm³]	[mm]			Type	Type		[mm] / [mm]		[W] / [A]	Product Code	Product Code
		WEZ	16 -	2 -	16 -			SF1 -	C -	P -	LxxxD16		140 / 7	PS 30-10-C	PBN 2-16
		WEZ	16 -	5 -	16 -			SF1 -	C -	P -	LxxxD16		150 / 9	PS 30-10-C	PBN 5-16
		WEZ	40 -	2 -	16 -		S* -	SF1 -	C -	P -	LxxxD16		140 / 7	PS 30-10-C	PBN 2-16
		WEZ	40 -	2 -	16 -	K	S* -	SF1 -	C -	P -	LxxxD34		140 / 7	PS 30-10-C	PBN 2-16
		WEZ	40 -	5 -	16 -		S* -	SF1 -	C -	P -	LxxxD16		150 / 9	PS 30-10-C	PBN 5-16
		WEZ	40 -	10 -	22 -		S* -	SF2 -	C -	P -	LxxxD34		240 / 8	PS 30-10-C#	PBN 10-22
		WEZ	40 -	10 -	22 -	K	S* -	SF2 -	C -	P -	LxxxD36		240 / 8	PS 30-10-C#	PBN 10-22
		WEZ	40 -	16 -	36 -		S* -	SF2 -	C -	P -	LxxxD36		400 / 9	PS 30-10-C#	PBN C16-36
		WEZ	40 -	35 -	34 -		S* -	SF2 -	C -	P -	LxxxD34		450 / 11	PS 35-20-C	PBN 35-34
		WEZ	40 -	60 -	37 -			SF2 -	C -	P -	LxxxD38		700 / 12	PS 70-22-C	PBN 60-37
		WEZ	63 -	35 -	34 -	K	S* -	SF2 -	C -	P -	LxxxD58		450 / 11	PS 70-22-C	PBN 35-34
		WEZ	63 -	60 -	37 -			SF2 -	C -	P -	LxxxD38		700 / 12	PS 70-22-C	PBN 60-37
		WEZ	63 -	60 -	37 -	K	S* -	SF2 -	C -	P -	LxxxD58		700 / 12	PS 70-22-C	PBN 60-37
		WEZ	63 -	60 -	54 -		S* -	SF2 -	C -	P -	LxxxD55		850 / 14	PS 70-22-C	PBN C60-54
		WEZ	63 -	125 -	54 -		S* -	SF2 -	C -	P -	LxxxD55		850 / 14	PS 70-22-C	PBN 125-54
		WEZ	63 -	200 -	58 -			SF2 -	C -	P -	LxxxD58		1000 / 15	PS 70-22-C	PBN 200-58

 LAST UPDATE: MARCH, 2006

© 2003 Dr. Eberl MBE-Komponenten GmbH