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OREZ 63-35-37-KS, oxygen resistant effusion cell with integrated cooling shroud and shutter on DN63 (O.D. 3.5") CF-flange, with 35 cm³ PBN crucible

• Oxygen resistance option for standard wire heater cells (WEZ, PEZ, NTEZ)
• Ni-alloy-wire heaters up to 1000°C
• Noble-metal-alloy-wire heaters up to 1200°C
• Pressure range from UHV up to several mbar
• Compatible with most MBE systems

Non-UHV applications like, for example, the compound growth of ZnO, require modified effusion cells. The Oxygen Resistant Effusion Cell OREZ has been designed for operation in oxygen rich or reactive gas atmosphere for a pressure range from 10^-4 mbar to several mbar. Specially selected oxygen resistant materials enable operation temperatures up to 1200°C

The use of a special Ni-alloy for heater wires and shielding parts allows cell operation in UHV and oxygen containing amtmosphere up to cell temperatures of 1000°C. Operation temperatures of up to 1200°C are attainable by the use of noble-metal-alloys for heater wires, shieldings and construction materials.

OREZ 63-60-54-DF with Dual Filament heater

Standard, cold lip and dual filament types are available, covering different evaporation material requirements. The right upper picture shows an oxygen resistant version of the PEZ with a dual filament heater, as well as a selection of suitable PBN crucibles.

For use in non-standard UHV systems customized cell designs deviant from standard effusion cell are possible. An example is the picture on the right, that shows a customized OREZ cell with Ni-alloy-wire heater, which is used for evaporation of PbO in 10^-3 mbar oxygen atmosphere. The crucible with a maximal diameter of 95 mm is a double-walled type, consisting of an outer PBN crucible and an inner MgO liner. This cell type has been built as a free standing heater without mounting flange.


The specifications and options for OREZ Oxygen Resistant Effusion Cells are almost the same as for all standard wire heater effusion cells:
- heater options: standard, hot lip, cold-lip and dual filament
- crucible materials: PBN, Al₂O₃, MgO, BeO, Y₂O₃, Quartz
- crucible sizes: 1.5ccm - 420ccm
- cell mounting: CF-flange, KF-flange, ISO-flange or customized
- thermocouple: Type K Chromel/Alumel (types R or S on request)
- integrated water cooling - integrated rotary shutter

OREZ oxygen resistant cell with 200  cm³ crucible and Ni-alloy-wire heater

The oxygen resistance option is available for substrate manipulators, too. To complete your high pressure suited equipment we recommend the use of SH-O substrate manipulators.

 LAST UPDATE: MARCH, 2006

© 2003 Dr. Eberl MBE-Komponenten GmbH