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WEZ 40-2-22, doping effusion cell on DN40 (O.D.2.75") CF-flange, with conical 2 cm³ PBN crucible

• Compatible with all MBE systems
• Conical shaped crucibles with crucible capacities 2, 5, and 12 cm³
• Most effective Ta-wire heating system
• Large flux distribution providing excellent homogeneities
• High reliability and long lifetime
• Optional: on cell flange integrated shutter

Our effusion cells WEZ and NTEZ are generally designed for elemental and compound evaporation or sublimation in the temperature range from 200°C to 1400°C.

Doping applications in MBE growth however require only low quantities of dopant material. Therefore, compact effusion cells with small crucible capacities and low flux rates, but wide angled flux distribution are needed. A typical doping flux is about 3 to 5 orders of magnitude smaller than a typical growth material flux.
The Doping Effusion Cells EZ with conical crucibles provide low power consumption, while producing excellent doping uniformities. For example, a doping level uniformity of about 1% on a 3" substrate at a distance of 150mm is reached with crucibles having a tapering angle of 10%. EZ cells can be used as doping source for various materials like e.g. Si, Be, Ga or In.

To facilitate the source selection by doping application we have created a special Doping Application Guide, where we compiled source recommendations for the most common doping applications.

Beside the standard crucible material PBN (pyrolytic boron nitride), other crucible materials such as Al₂O₃ or PG (pyrolytic graphite) are also available. The crucible is heated by a tantalum wire filament supported by PBN rings. This wire heater concept provides excellent temperature uniformity within the crucible and effective heating even at the crucible lip, and allows the use of different shaped crucibles. Due to the reduced touch between the filament wires and the PBN supporting rings minimum decomposition of PBN at operation temperature is achieved. Other advantages are excellent reliability, long-term stability and an extended lifetime, compared with Ta-foil heaters.



Application

The Doping Effusion Cells are recommended for elements and compounds evaporated or sublimated at temperatures in the range 200-1400°C, e.g. Ga, In, Al, Si, Be, Cu, Ag etc.

Effusion cells with conical shaped crucibles are specially optimized for doping applications.
If two (or more) dopant materials shall be evaporated, DCS dual dopant cluster sources can be used.

Three different crucible sizes are available. Dimensions of these crucibles are shown in the figures on the right.

part no. 415-00-040  PBN 2 cm³ crucible

part no. 415-00-020  PBN 5 cm³ crucible

part no. 415-00-057  PBN 12 cm³ crucible

Technical Data

Dimensions

Specific Data

For general information on CF mounting flanges see "Flange and Gasket Dimensions".

System manufacturer:    MBE-Komponenten, Omicron and other manufactures not separately listed
				[cm³]	[mm]		Type	Type		[mm] / [mm]		[W] / [A]	Product Code	Product Code
		WEZ	40 -	2 -	22 -	S* -	SF1 -	C -	P -	LxxxD34		200 / 10	PS 30-10-C	PBN C2-22
		WEZ	40 -	5 -	27 -	S* -	SF1 -	C -	P -	LxxxD36		250 / 10	PS 30-10-C	PBN C5-27
		WEZ	40 -	12 -	36 -	S* -	SF1 -	C -	P -	LxxxD36		350 / 11	PS 35-20-C	PBN C12-36
		NTEZ	40 -	2 -	22 -	S* -	SF1 -	K -	P -	LxxxD34		100 / 7	PS 30-10-C	PBN C2-22
		NTEZ	40 -	5 -	27 -	S* -	SF1 -	K -	P -	LxxxD36		180 / 7	PS 30-10-C	PBN C5-27
		NTEZ	40 -	12 -	36 -	S* -	SF1 -	K -	P -	LxxxD36		350 / 11	PS 30-10-C	PBN C12-36

 LAST UPDATE: MAY, 2006

© 2003 Dr. Eberl MBE-Komponenten GmbH