Keywords
Keyword: Power Supply and Temperature Control PS
Stichwort(e):
bakeout temperature,
CF flange,
cooling shroud,
Createc,
crucible,
deposition,
deposition stage,
Dr. Eberl,
epitaxy,
feedthrough,
filament,
heated stage,
heater,
manipulator,
mask,
MBE,
Omicron,
oxygen resistant,
Oxygen Resistant Substrate Manipulator SH-O,
Riber,
sample,
sample holder,
substrate,
substrate manipulation,
SVTA,
thermocouple,
UHV,
VEECO,
wafer,
wafer holder,
water cooling shroud,
wire heater