General Ordering Information

This catalogue presents the wide range of standard and non-standard MBE components and related instrumentation we supply. Each chapter details the relevant product's specific data and ordering information. Furthermore our product identification codes are explained on the following page. Our specialists are however on hand to advise you and assist you to make the best choice amongst the many possibilities available. It is very useful during this process to specify as many parameters as possible, and the following checklists are designed to help you collate the information necessary to request a quotation or to order.

Ordering Replacement Sources for Standard MBE Systems

We can build replacement sources for most MBE systems. To provide a fully compatible evaporation source for your system, please specify the model number and manufacturer of the source and/or of the system. If you do not have the original data then please supply us with the outer dimensions. Following check-list may help:

• source identification code (e.g. WEZ 40-10-KS-HL) - from MBE-Komponenten GmbH
• source model number (e.g. Riber BN135L, EPI-5-D-C) - from other suppliers
• system type (e.g. Varian GEN II, Riber P32, VG V80, Omicron MULTIPROBE MBE)
• source dimensions (flange size, in-vacuum diameter, in-vacuum length, crucible type)

Ordering Sources for Custom-made MBE Systems / Special MBE or UHV Chambers

If necessary we can provide our sources with modified geometrical parameters whilst special source lengths are normally available free of charge. For information or a quotation please do not hesitate to ask, specifying where possible the following:

• sketch of the chamber
• port dimensions (flange size, inside port tube diameter, inside diameter of cooling shrouds)
  Note: older MBE systems may have ports with a reduced tube i.d.
• substrate information (focal point and angle and/or substrate distance, substrate size, substrate type)
• cooling information (e.g. water or LN2 cooling shroud)
• application (see the following section)

Source Selection by Application

Our material/source selection table with the vapour pressure data of elements and compounds may help you find the suitable evaporation source for your application. In combination with some information about the geometry of your vacuum system we can offer you the sources suitable to your needs. We recommend considering the following:

• evaporation material (see the selection table page 184 ff)
• doping or growth application (doping levels, growth rates, flux rates, operation temperatures)
• substrate size and source-to-substrate distance (for estimation of homogeneity)
• environmental factors

Ordering Custom-made Sources for Special Applications

We offer a wide variety of special sources and solutions. The flexibility to offer custom-made and modified standard sources using new and innovative designs is a particular strength of our company. Key-words are:

• cluster sources (two or more individual sources on a single flange)
• limited space / cells without flange / special chamber geometry
• special environmental factors (e.g. high oxygen partial pressure, vacuum pressure > 10-4 mbar)
• new applications

Source Options / Additional Equipment

We provide several design options of our standard products. Please see the data tables at the end of each product chapter in this catalogue. Power supply and temperature controller are available for all source types. Before ordering please check your needs for additional equipment, such as:

• cell shutter
• integrated or additional cooling shrouds
• power supply and/or temperature controller, cable sets
• additional electronic equipment (e.g. shutter control unit)

Flange and Port Dimensions

Please refer to page 176 for detailed description of our flanges. To make sure our cell fits your port, please note:
Some UHV systems have ports with reduced tube dimensions. The inside port diameter depends on the stainless steel tube used with the flange, especially in case of DN40 (O.D. 2.75") and DN63 (O.D. 4.5") CF flanges. If you are not sure it would be useful to measure the inside tube diameter of your port. It would also help to check, if welding seams between flange and chamber tube or reduced inside diameters of cooling shrouds make the real inside diameter of your port smaller than it seems to be.

General Product Identification

In addition to the complete product name, our components have a code for the product-type, which can be found in the table of contents and throughout the catalogue, e.g. VACS for "valved arsenic cracker source". The identification codes for the main product features should be added to this type-code, typically beginning with the cells' mounting flange size and ending with optional product characteristics.
Thus the general product identification code is built up as follows:
Product - complete identification code:

Accessories and spare parts for our products have Part Numbers for identification. For example you may order: "Filament Set SUSI 40, Part Number 160-00-602".

 LAST UPDATE: NOVEMBER, 2004

© 2003 Dr. Eberl MBE-Komponenten GmbH